Interferometric Profile Measurement Based on Subtraction and Addition of Optical Waves

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Important Dates

Conference:

Aug. 18-20, 2018

Full Paper Due: Jul. 20, 2018

Abstract Due: Jul. 20, 2018

Audience Registration Due:
Aug. 18, 2018

Presentations of The Int'l Symposium on Photonics and Optoelectronics (SOPO 2016)

● Interferometric Profile Measurement Based on Subtraction and Addition of Optical Waves
Author(s)
Kuo-Chen Lang
Affiliation(s)
Nan-Kai University of Technology
KEYWORDS
Interferometric Profile Measurement, Subtraction, Addition of Optical Waves
ABSTRACT
An interferometer based on the subtraction and addition between wave fields is developed for determining the surface topography. Four interference fringe images are recorded by the proposed interferometer under predetermined polarization states of signal wave and reference wave so that the subtraction and addition between waves are realized. The surface profile is then obtained by unwrapping the phase map which is generated from the four images. The error introduced by phase shift error in the phase shifting interferometer, which is well-known and widely employed, is avoided.