Real Time Interferometric Ellipsometry

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Important Dates

Conference:

Aug. 18-20, 2018

Full Paper Due: Jul. 20, 2018

Abstract Due: Jul. 20, 2018

Audience Registration Due:
Aug. 18, 2018

Presentations of The Int'l Symposium on Photonics and Optoelectronics (SOPO 2016)

● Real Time Interferometric Ellipsometry
Author(s)
Hui-Kang Teng
Affiliation(s)
Nan-Kai University of Technology
KEYWORDS
Real Time, Interferometric, Ellipsometry
ABSTRACT
A heterodyne interferometer is presented for measuring the ellipsometric angles in real time. These two angles are calculated in terms of two heterodyne interference signals that determined accurately by maximum likelihood method. Since the common path design of the interferometer eliminates the noises carried by the heterodyne signals, high accuracy of the measurement is achieved.